Journal
CHEMICAL COMMUNICATIONS
Volume -, Issue 46, Pages 7140-7142Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/b911888h
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Funding
- National Science Foundation [0400292]
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Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.
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