Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 18, Issue 1, Pages 435-439Publisher
AMER INST PHYSICS
DOI: 10.1116/1.591207
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The clustering of low-energy ion-implanted boron has been investigated. Two 1 keV boron implantations at doses of 1 x 10(15) and 5 x 10(15) cm(-2) were annealed for 10 s between 700 and 1100 degrees C. The evolution of the boron concentration profiles was monitored using secondary ion mass spectrometry. Electrical activation was measured with four-point-probe measurements and spreading resistance profiling. The displaced Si concentration profiles were determined from medium-energy ion-scattering measurements. (C) 2000 American Vacuum Society. [S0734-211X(00)01301-9].
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