Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Volume 39, Issue 9B, Pages 5451-5455Publisher
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.39.5451
Keywords
sputtering; PLZT; SrRuO3; FeCAP; J-E characteristic; polarization fatigue characteristic; compacted powder target; oxygen annealing
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Epitaxially c-axis oriented PLZT films with the composition (Pb0.925La0.075)(Zr0.4Ti0.6)O-3 were deposited on Pt/MgO(100) substrate by rf-magnetron sputtering using a compacted powder target with the composition (0.8PLZT+0.2PbO). Pt/SrRuO3(SRO)/PLZT/Pt capacitors were successfully fabricated by forming Pt/SRO top electrodes onto PLZT films.`The 206-nm-thick PLZT films with layered Pt/SRO top electrodes exhibited a slightly high leakage current at a low electric field: compared with PLZT films with the same thickness and a single Pt top electrode. The values of switchable polarization after 10(10) cycles for Pt/PLZT/Pt capacitors decreased up to around 17% of their initial values, whereas the switchable polarization for Pt/SRO/PLZT/Pt capacitors hardly exhibited any fatigue degradation due to polarization reversal. The layered Pt/SRO is useful as a top-electrode material for fabricating the low leakage and high endurance ferroelectric capacitors.
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