3.8 Article Proceedings Paper

Laser induced direct implantation of ions

Journal

CZECHOSLOVAK JOURNAL OF PHYSICS
Volume 50, Issue -, Pages 81-90

Publisher

INST PHYSICS ACAD SCI CZECH REPUBLIC
DOI: 10.1007/BF03165861

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Results on iodine laser production of Ag, Au, Pb, Sn and Ta ions are presented and experiments on their implantation into steel, Al and plastics are compared and discussed. Ions were implanted without additional acceleration into metals to the depth of several hundreds of nanometers, and into plastics to a depths of up to several micrometers.

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