Journal
CERAMICS INTERNATIONAL
Volume 44, Issue 18, Pages 22225-22234Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2018.08.342
Keywords
FTO thin film; Laser annealing; Ultrasonic vibration; Overlapping rate; Transmittance; Sheet resistance
Categories
Funding
- National Natural Science Foundation of China [51805220, 61405078]
- Science and Technology Planned Project of Jiangsu Province of China [BE2015037]
- Natural Science Foundation of Jiangsu Province of China [BK20140567]
- Jiangsu Government Scholarship for Overseas Studies [JS-2016-095]
- Young Backbone Teacher Cultivating Project of Jiangsu University
Ask authors/readers for more resources
An ultrasonic-vibration-assisted laser annealing method was developed to enhance the performance of fluorine doped tin oxide (FTO) thin films. The influences of ultrasonic vibration, laser scan line overlapping rate (L-OR) and laser spot overlapping rate (Soil) on surface morphology, FTO layer thickness, RMS roughness, crystal structure and photoelectric properties of the FTO films were investigated. The results indicated that the presence of ultrasonic vibration during laser annealing could significantly enhance the film compactness, and using moderate L-OR and S-OR. values resulted in significantly decreased FTO layer thicknesses and RMS roughnesses as well as slightly increased crystallite sizes, thus yielding significantly improved optical transmittance values and slightly enhanced electrical conductivity values. It was found that the optimal L-OR and S-OR values for ultrasonic vibration-assisted laser annealing of the FTO films were 80% and 90%, respectively. The as-obtained film possessed the best overall photoelectric property with an average transmittance (400-800 nm) of 85.9%, a sheet resistance of 8.7 Omega/sq and a figure of merit of 2.51 x 10(-2) Omega(-1). This work may be of great significance in terms of performance optimization of transparent conducting oxide (TCO) thin films.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available