Journal
CERAMICS INTERNATIONAL
Volume 44, Issue 16, Pages 20465-20471Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2018.08.041
Keywords
Thin films; Rf-magnetron sputtering; Ferroelectric properties; Leakage current conduction; Dielectric properties
Categories
Funding
- National Natural Science Foundation of China [51271036]
- National Key R&D Program of China [2016YFB0402701]
- Focus on Research and Development Plan in Shandong Province [2017GGX202008]
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Bi4Ti3O12 (BiT) thin films with thicknesses ranging from 535 to 870 nm were deposited on Pt(111)/Ti/SiO2/Si substrates by rf-magnetron sputtering method. The films were crystallized by direct thermal annealing in air at 650 degrees C. The effects of film thicknesses and crystalline morphology on ferroelectric, leakage current conduction and dielectric properties were investigated. XRD and SEM analysises reveal that BiT thin film deposited at 400 degrees C is amorphous and exhibits a non-crystalline morphology. After annealing treatment, the amorphous film transformed into Aurivillius Bi4Ti3O12 crystalline phase with rodlike grains. The electrical properties show that the as-deposited thin film is a lossy dielectric with absence of ferroelectricity. The remnant polarization of crystalline BiT thin films increases slightly with decreasing thickness. The leakage currents of annealed BiT films exhibit ohmic behavior in low voltage region and Schottky emission conduction characteristic in high voltage region, respectively. For crystalline BiT films, the dielectric constant decreases significantly with increasing film thicknesses.
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