Journal
MICRON
Volume 33, Issue 1, Pages 39-51Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/S0968-4328(00)00072-X
Keywords
energy-filtered transmission electron microscopy (EFTEM); electron energy-loss spectroscopy (EELS); signal-to-noise ratio (SNR); energy-filtered image (EFI); elemental map; jump-ratio image; semiconductor interfaces
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This paper systematically demonstrates that energy-filtered transmission electron microscope (EFTEM) images of a planar interface between two single crystals have increased compositional contrast and decreased residual diffraction contrast when the sample is oriented so that the electron beam is parallel to the interface, but not directly on a zone axis. This off-axis orientation reduces diffraction contrast in the unfiltered (and zero-loss) image, which in turn, reduces residual diffraction contrast in single energy-filtered TEM (EFTEM) images, thickness maps, jump-ratio images, and elemental maps. Most importantly, this procedure produces EFTEM images that are more directly interpretable and, in most cases, possess superior spatial resolution compared to EFTEM images acquired directly on a zone axis. (C) 2001 Elsevier Science Ltd. All rights reserved.
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