IR study of the formation process of polymeric hydrogenated amorphous carbon film

IR spectroscopic studies have been carried out on samples, which were prepared from benzene at relatively high pressure and low self-bias voltage region. The samples show well-resolved spectral features both in the sp(3)- and the sp(2)-hybridized spectral regions. The spectral resolution and separation of bands in the sp(2) region, and the good signal-to-noise ratio allows Gaussian decomposition of the distinct bands, even in the more crowded sp(3) region. The C-H vibrations show two different neighborhoods, a nearly stress-free, and a highly stressed one. By increasing the deposition voltage, the amplitude of the stress-free region decreases. (C) 2002 Elsevier Science B.V. All rights reserved.