Tunable passive integrated circuits using BST thin films

Preliminary results from our work on compact phase shifters using BaSrTiO3 thin films are presented. A reflection phase shifter utilizing a lumped element resonator achieved 120degrees phase shift at 10GHz with -3.3dB insertion loss. A synthetic transmission line true time delay phase shifter at 5GHz was able to achieve a phase shift of 60degrees with -1.1dB insertion loss. These results were obtained in a process suitable for integration with conventional passive and hybrid circuit technologies.