Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 10, Issue 1, Pages 17-21Publisher
SPRINGER-VERLAG
DOI: 10.1007/s00542-002-0244-0
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Electrostatic film based light modulators are discussed. Electrostatically driven microstructures can close or open parts of a transparent substrate modulating the incident light. The surface of the microstructures can be used as shutter or as mirror or simultaneously in both functions. Photolithography and thin film technologies have been used to build microshutter-micromirror arrays. Refractive, diffractive and micro-optical systems based on glasses or polymers can be combined with the presented arrays in integrated solutions. Finally a display integrated in an automotive instrument cluster is discussed.
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