Journal
OPTICS LETTERS
Volume 28, Issue 21, Pages 2058-2060Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.28.002058
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A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection. (C) 2003 Optical Society of America.
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