Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume 42, Issue 1, Pages 223-227Publisher
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.42.223
Keywords
TCO; IZO and ITO films; rf-magnetron sputtering; PET substrate; the AFM images; surface uniformity
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Using a In2O3 and ZnO powder mixture with a ratio of 95 : 5 in wt% as a target, highly transparent conducting oxide (TCO) films are prepared on polyethylene terephthalate (PET) substrates by rf-magnetron sputtering. These films have amorphous structures with excellent electrical stability, surface uniformity and adhesion to the PET substrate and can be prepared at room temperature. In particular, In2O3-ZnO (IZO) films directly deposited on PET without a hard-coated layer have nearly similar electrical properties, higher transmittance and a more uniform surface in comparison with those deposited on a hard-coated layer of PET. When a TCO material is deposited on PET, IZO is more suitable than indium tin oxide (ITO) in several aspects such as the optical, electrical, and etching properties and its surface uniformity.
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