Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 21, Issue 1, Pages 23-28Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.1529652
Keywords
-
Ask authors/readers for more resources
It has been shown that glancing angle deposition (GLAD) coupled with a prefabricated seed layer can be used to fabricate periodic microstructures. In this article, we show that the column competition effects inherent within aperiodic GLAD films can be delayed in periodic films due to the tendency of the film to achieve a preferred density at a given flux incidence angle. This technique, coupled with the use of the three-dimensional ballistic simulator, may allow for the design and use of periodic GLAD microstructures in such applications as magnetic pillars and three-dimensional photonic crystals. (C) 2003 American Vacuum Society.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available