Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 50, Issue 1, Pages 144-151Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2002.806474
Keywords
CCD; high-speed; image sensor; in-situ storage
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An image sensor for a video camera of 1 000 000 frames per second (fps) was developed. The specifications of the developed sensor are as follows: 1) frame rate: 1 000 000 fps; 2) pixel count: 81 120 (= 312 x 260) pixels; 3) total number of successive frames: 103 frames; 4) gray levels: 10 b; and 5) open area of each pixel (fill factor): 580 square micrometers (13%). The overwriting function is installed for synchronization of image capturing with occurrence of the target event. Sensitivity is significantly high with the large photogate. Some innovative technologies were introduced to Achieve ultrahigh performance, including slanted linear CCD in situ storage, curving design procedure, and a CCD switch with fewer metal shunting wires. They are applicable to the development of other new high-performance image sensors.
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