Journal
OPTICAL MATERIALS
Volume 21, Issue 1-3, Pages 495-498Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0925-3467(02)00189-1
Keywords
channel waveguide; grating; nonlinear optical polymer; mask/master; replica
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Channel waveguide with grating is fabricated in nonlinear optical (NLO) polymer thin films by means of simultaneous embossing and photobleaching. A combined structure of mask/master consisting of a photomask part and a grating die part which is made of polyimide is fabricated. Then the mask/master is set on the NLO polymer films and both embossing and photobleaching are performed simultaneously. Profiles of the replica grating and the channel waveguide are estimated. (C) 2002 Elsevier Science B.V. All rights reserved.
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