Journal
IEEE JOURNAL OF SOLID-STATE CIRCUITS
Volume 38, Issue 12, Pages 2297-2305Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSSC.2003.819171
Keywords
biological cells; CMOS; dielectrophoresis; intelligent actuators; integrated sensors; lab-on-a-chip; optical Sensors
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Manipulation of populations of living cells on an individual basis is essential for the investigation of complex interactions among cells. We present a new approach to the integration on silicon of dielectrophoretic actuators and optical sensors that allow; us to carry out this task. The device presented in this paper is an 8 x 8 mm(2) chip implemented in a two-poly three-metal 0.35-mum CMOS technology featuring 102,400 actuation electrodes, arranged in an array of 320 x 320, 20 mum x 20 mum microsites each comprising addressing logic,,an embedded memory for electrode programming, and an optical sensor. The chip enables software-controlled displacement of more than 10,000 individual living cells, allowing biologists to devise complex interaction protocols. that are impossible to manage otherwise. The manipulation does not damage the viability of the cells, so that this approach could be a unique extension to the techniques already available to biologists.
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