Journal
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
Volume 18, Issue 6, Pages 670-679Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/b301293j
Keywords
-
Categories
Ask authors/readers for more resources
Glow discharge optical emission spectroscopy (GD-OES) is briefly reviewed, with particular reference to topics relevant to the application field of near surface and thin film analysis. The special needs and requirements for thin film analysis, in contrast to coating and bulk analysis, are pointed out. A task list is developed which shows the requirements of further developments to the technique and the fundamentals. The state-of-the-art is presented in measurement technique, GD source control and design, the effect of traces of molecular gases, correction and quantification procedures, contributions of modelling and, finally, reference materials for thin film analysis.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available