Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 31, Issue 6, Pages 1292-1298Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPS.2003.820682
Keywords
argon metastable atoms; one-dimensional planar simulation; particle-in-cell (PIC) with Monte Carlo collisions
Categories
Ask authors/readers for more resources
A planar one-dimensional (1-D) particle-in-cell (PIC) simulation with Monte Carlo collisions (MCC) has been used to study the effect of including metastable argon on the characteristics of a 13.56-MHz argon discharge. Reactions such as metastable creation, ionization from the metastable state, metastable quenching to resonant level, and metastable pooling were taken into account. At low pressure (0.05 torr), metastables were found to have little influence on the discharge. However, at a pressure of 1 torr, ionization from the metastable state and collisions between two metastables represent a significant percentage of the total ionization rate, strongly influencing the electron heating and the discharge potential. The effect of pressure and applied voltage on the discharge parameters is studied and a comparison between discharges with and without metastables is presented. A PIC-MCC simulation was compared to the fluid model of Lymberopoulos and Economu [33] using their published parameters, showing that using PIC simulation the main process of metastable loss is metastable pooling.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available