Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 53, Issue 1, Pages 459-462Publisher
ELSEVIER
DOI: 10.1016/S0007-8506(07)60739-2
Keywords
ultra-precision polishing; atomic surface property; scanning probe microscopy
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High purity calcium fluoride (111) single crystals were float polished to a flatness of 32 nm p-v on 90-mm-diameter samples that had a surface roughness of 0.72 nm Ry, and 0.077 nm rms, as measured with a Scanning Probe Microscope (SPM). By observing an area of a float-polished surface with a high resolution transmission electron microscope, it was determined that the float-polished surface had a perfect (111) lattice with small atomic steps, and no subsurface damage. The polished surface roughness depends on the mismatch between the sample surface and the (111) plane. This result was also verified by SPM observation.
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