Journal
ANNALEN DER PHYSIK
Volume 13, Issue 1-2, Pages 68-69Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/andp.200310050
Keywords
thin film; reduced SrTiO3; hydrogen plasma cleaning method
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SrTiO3 single crystal surfaces were reduced using an hydrogen plasma cleaning method at room temperature. Transport measurements show that the reduced SrTiO3 surfaces are metallic with mobilities as high as 2.4 x 10(3) cm(2)/Vs at 10 K, comparable to those of bulk single crystals. The average carrier concentration is deduced to be similar to1 X 10(18) cm(-3) and the reduced thickness similar to0.65 mum. (C) 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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