Metal phosphate and fluoride catalysts active for hydrolysis of NF3

NF3 was decomposed over various ortho, pyrophosphates and some fluorides at 450-600 K. Mn2P2O7 and CePO4 were the most active. The catalytic activity of Co2P2O7, Co-3(PO4)(2), CrPO4, Cu2P2O7, and Cr-4(P2O7)(3) followed in this order. Zn-3(PO4)(2) and AlPO4 were less active. Activity of pyrophosphate was comparable to that of ortho-phosphate. Products were NO2 and a very small amount of N2O except for HE An essential reaction was 2NF(3) + 3H(2)O -> 6HF + NO + NO2. Catalytic activity of phosphates was proportional to not the amount but the concentration of surface hydroxyls, suggesting that the reaction proceeds via a bidentate surface intermediate. (C) 2009 Elsevier B.V. All rights reserved.