Growth and characterization of La(0.7)Sr(0.3)NnO(3) films on various substrates

Themanganite La0.7Sr0.3MnO3 (LSMO) films are deposited on various substrates, such as single crystal LaAlO3(0 0 1), SrTiO3(0 0 1), MgO(0 0 1), SiO2/Si(0 0 1) and amorphous quartz, by using a magnetron DC sputtering system. According to the X-ray diffraction patterns, either the c-axis oriented or the polycrystalline LSMO films are obtained as the LSMO films are deposited on these substrates, depending on the lattice mismatch between the LSMO and the substrates. The c-axis oriented LSMO films exhibit typical transport properties, whereas the polycrystalline LSMO films show significantly different behaviors of the temperature-dependent resistance, and the magnetoresistance. This work provides characterizations of the LSMO films on several substrates for further applications integrated with other thin-film devices which are grown on different substrates. (C) 2003 Elsevier B.V. All rights reserved.