4.8 Review

Nanolithography and nanochemistry: Probe-related patterning techniques and chemical modification for nanometer-sized devices

Journal

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
Volume 43, Issue 19, Pages 2480-2495

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/anie.200300609

Keywords

atomic force microscopy; lithography; nanostructures; oxidation; scanning tunneling microscopy

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