Generation of 5-W deep-UV continuous-wave radiation at 266 nm by an external cavity with a CsLiB6O10 crystal

A Brewster-cut CsLiB6O10 crystal is employed as an external resonant frequency doubler to generate cw deep-UV radiation at 266 nm. We have generated 5.0 W of usable cw output power, which is 6.1 W in the crystal, for an incident green power of 9.6 W, corresponding to an internal conversion efficiency of 61.8%. The power obtained is, to our knowledge, three times higher than previously reported for cw 266-nm generation. (C) 2004 Optical Society of America.