Journal
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
Volume 24, Issue 6, Pages 1005-1008Publisher
ELSEVIER SCI LTD
DOI: 10.1016/S0955-2219(03)00382-0
Keywords
chemical solution deposition; electrical conductivity; LaNiO3; perovskite
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LaNiO3 (LNO) thin films were prepared onto Si substrate by chemical solution deposition. The orientation of the LNO films was controlled by changing concentration of precursor solution. The resistivity of the resultant LNO films was 1.82 - 2.57 x 10(-3) Omega cm. The obtained 0.3 M-LNO film was flat surface, highly (100) orientation, and had a low resistivity of 1.85 x 10(-3) Omega cm. PbZr0.53Ti0.47O3 was fabricated onto the resultant 0.3 M-LNO electrode, and the sample showed a good ferroelectric property. (C) 2003 Elsevier Ltd. All rights reserved.
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