4.7 Article

Influence of the doping method on the sensitivity of Pt-doped screen-printed SnO2 sensors

Journal

SENSORS AND ACTUATORS B-CHEMICAL
Volume 97, Issue 1, Pages 67-73

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-4005(03)00648-8

Keywords

SnO2 sensors; screen-printing; Pt loading; detection limit

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In this work, we study the influence of the introduction method of Pt atoms on the sensitivity to traces of ethanol of Pt-doped SnO2 sensors. The tin oxide films were obtained by a screen-printing process. Two different methods were employed to introduce Pt atoms on SnO2 films. In the first one, the Pt atoms were added to the screen-printed tin oxide layer by using RF magnetron sputtering and a subsequent thermal treatment. The second method consisted of mixing SnO2 and Pt pastes before the screen-printing process. The different active layers (including un-doped tin oxide) were carefully examined relative to their sensitivity to ethanol at different working temperatures. Sensors prepared by the second method showed sensitivity to ethanol four times higher than one of the sensors prepared by the first method and 12 times higher than un-doped sensors. XPS and scanning electron microscopy (SEM) measurements showed that this behaviour could be associated with the spatial distribution of the doping elements within the tin oxide film. While in Pt-sputtered sensors most of the Pt atoms were found at the surface of the active layer, for the sensors made by mixing Pt and SnO2 pastes, a homogeneous distribution of the Pt atoms was observed. These sensors show high sensitivity and fast response time to ethanol vapours, with a detection limit in the ppb range. (C) 2003 Elsevier B.V. All rights reserved.

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