Synthesis of DLC films by electrolysis of dimethyl sulfoxide

Amorphous diamond-like carbon (DLC) films were deposited on a silicon substrate by electrolysis of analytically pure dimethyl sulfoxide at relatively low voltage (150 V). Atomic force microscopy was used to investigate the surface morphology of the sample and indicated that the film was composed of small grains similar to 100 nm in size. The composition and structure of the films were characterized by X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, and Raman spectroscopy. Results showed that the deposits were hydrogenated DLC films containing considerable sp(3) carbon, which could be transformed to sp(2) carbon through an annealing treatment. (C) 2004 The Electrochemical Society.