4.2 Article Proceedings Paper

Influence of heat treatment on Sr0.9Bi2.2Ta2O9 thin films prepared by aqueous CSD

Journal

INTEGRATED FERROELECTRICS
Volume 62, Issue -, Pages 177-182

Publisher

TAYLOR & FRANCIS LTD
DOI: 10.1080/10584580490457163

Keywords

SrBi2Ta2O9; aqueous solution-gel; thin film; heat treatment

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Sr0.9Bi2.2Ta2O9 thin films were prepared on a Pt-substrate by aqueous chemical solution deposition. The applied heat treatment seems to have a significant influence on the ferroelectric response, crystallinity and surface morphology. For two-layer thin films annealed at 700degreesC in oxygen, the P-r-value increased from 3.6 until 5.5 muC/cm(2), c-axis preferred orientation was considerably lowered and rod-like instead of spherical grains were grown when the second pyrolysis step at 520degreesC was omitted.

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