Journal
INTEGRATED FERROELECTRICS
Volume 71, Issue -, Pages 121-160Publisher
TAYLOR & FRANCIS LTD
DOI: 10.1080/10584580590964574
Keywords
energy scavenging; power harvesting; MEMS; piezoelectric; vibration energy conversion; wireless sensors
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Design considerations for piezoelectric-based energy harvesters for MEMS-scale sensors are presented, including a review of past work. Harvested ambient vibration energy can satisfy power needs of advanced MEMS-scale autonomous sensors for numerous applications, e.g., structural health monitoring. Coupled 1-D and modal (beam structure) electromechanical models are presented to predict performance, especially power, from measured low-level ambient vibration sources. Models are validated by comparison to prior published results and tests of a MEMS-scate device. A non-optimized prototype low-level ambient MEMS harvester producing 30 mu W/cm(3) is designed and modeled. A MEMS fabrication process for the prototype device is presented based on past work.
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