A fabrication platform for electrically mediated optically active biofunctionalized sites in BioMEMS

We report a new approach for microfluidic optical bioanalysis that is based on the electrically driven assembly of biocomponents on a transparent sidewall and the optical detection of the assembled components using planar waveguides. This allows localized electrical signals for bio-assembly and optical signals for bio-detection that can easily be applied in MEMS systems. We demonstrate a BioMEMS design incorporating this scheme and its output signal when using fluorescent detection.