4.8 Article

Mechanism of the effects of low temperature Al2O3 passivation on graphene field effect transistors

Journal

CARBON
Volume 53, Issue -, Pages 182-187

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.carbon.2012.10.046

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Funding

  1. WCU through NRF
  2. Korean government (MEST) [R31-10026]
  3. MKE
  4. KIAT

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The origin of the device instability of chemical vapor deposited graphene metal oxide semiconductor field effect transistor has been investigated while varying the characterization time scale from milliseconds to a few tens of seconds. When oxygen diffusion to the graphene interface was suppressed with Al2O3 passivation layer, the hysteresis activated with a, time scale over a few tens of seconds was reduced significantly at both electron and hole branches of current-voltage curves. However, a fast charge trapping process occurring within a few milliseconds was not affected by the passivation and became a dominant mechanism of hysteresis. (C) 2012 Elsevier Ltd. All rights reserved.

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