4.8 Article

Layer-by-layer synthesis of large-area graphene films by thermal cracker enhanced gas source molecular beam epitaxy

Journal

CARBON
Volume 49, Issue 6, Pages 2046-2052

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.carbon.2011.01.033

Keywords

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Funding

  1. Defense Microelectronics Activity (DMEA) [H94003-10-2-1003]

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A thermal cracker enhanced gas source molecular beam epitaxy system was used to synthesize large-area graphene. Hydrocarbon gas molecules were broken by thermal cracker at very high temperature of 1200 degrees C and then impinged on a nickel substrate. High-quality, large-area graphene films were achieved at 800 degrees C, and this was confirmed by both Raman spectroscopy and transmission electron microscopy. A rapid cooling rate was not required for few-layer graphene growth in this method, and a high-percentage of single layer and bilayer graphene films was grown by controlling the growth time. The results suggest that in this method, carbon atoms migrate on the nickel surface and bond with each other to form graphene. Few-layer graphene is formed by subsequent growth of carbon layers on top of existing graphene layers. This is completely different from graphene formation through carbon dissolving in nickel and then precipitating from the nickel during rapid substrate cooling in the chemical vapor deposition method. (C) 2011 Elsevier Ltd. All rights reserved.

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