Plasma-assisted atomic layer deposition of palladium

A method is presented for the atomic layer deposition (ALD) of palladium using remote hydrogen plasma as the reducing source and agent. Palladium was deposited on iridium, tungsten and silicon at 80 degreesC using a remote inductively coupled hydrogen plasma with palladium(II) hexafluoroacetylacetonate as the precursor. In the case of the Pd film grown on Ir, the carbon and fluorine content were significantly reduced compared to previous thermal ALD results. Use of remote plasma eliminated the noble metal substrate requirement needed for thermal ALD, enabling films to be grown on W and Si. Ultra-thin Pd films grown on W and Si possessed a nearly random texture from reflection high-energy electron diffraction (RHEED) measurements. Atomic force microscopy (AFM) images showed very different surface morphologies for the different substrates suggesting very different substrate film interactions. X-ray photoelectron spectroscopy (XPS) measurements indicate high quality Pd films for all substrates, suggesting the substrate temperature was low enough to prevent dissociation of the hfac ligand and adequate C and F scavenging by the atomic hydrogen. The remote hydrogen plasma source results in the loss of selectivity but growth is evident on every surface used including surfaces that do not react strongly with the Pd precursor and are not catalytic towards the dissociation of molecular hydrogen.