Alignment of nematic liquid crystal molecules using nanometer-sized ultrafine patterns by electron beam exposure method

We have investigated the alignment of nematic liquid crystal (NLC) molecules using nanometer-sized ultrafine groove, tilted, and dot patterns fabricated by the electron beam exposure method. In order to improve the wetting condition of NLCs, we sputtered silicon dioxide on a substrate after the fabrication of ultrafine patterns. For a homogeneous alignment cell with an ultrafine groove pattern, an azimuthal anchoring energy of 2.84 x 10(-4) J/m(2) was obtained. We also confirmed tilted and homeotropic alignments using tilted and dot patterns, respectively.