Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 228, Issue -, Pages 378-382Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nimb.2004.10.074
Keywords
Rutherford backscattering; double scattering; multiple scattering; grazing angle; ultra-thin films
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We present an analytical model for calculation of double scattering in RBS spectra. We show that, in grazing angle of incidence or detection, events with small scattering angle must be taken into account, as long as they lead to paths that are significantly different from the corresponding single scattering event. The effect of lateral spread due to multiple scattering is also taken into account, but in most cases it is not important. We apply the model to thin PtSi films on Si. Excellent results are obtained, except for ultra-thin films measured at extremely grazing angle of incidence, where the analytical model breaks down. (C) 2004 Elsevier B.V. All rights reserved.
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