Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 81, Issue 4, Pages 701-714Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-005-3227-z
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There is an increasing interest in lead-zirconate-titanate (PZT) based ferroelectric thin film and devices in recent years. Pulsed laser deposition (PLD) technique has been demonstrated to be a versatile and successful tool for the deposition of epitaxial multi-component metal oxide films and heterostructures. This review presents a reasonable understanding of the relationship between PLD processing and composition, crystal structure and orientation of PZT ferroelectric thin films, and heterostructures. Processing-related issues from PLD of PZT thin films and material-integration strategies developed to fabrication of highly oriented or epitaxial PZT thin film based capacitors with excellent ferroelectric properties are discussed in detail.
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