Journal
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
Volume 142, Issue 1, Pages 1-25Publisher
ELSEVIER
DOI: 10.1016/j.elspec.2004.07.004
Keywords
spatial resolution; AES; XPS; energy resolution
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This review presents the recent developments published in the literature about the use of Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) at high energy or spatial resolution. The past and present improvements due to technology (analysers, excitation source), and to mathematical procedures are described and discussed. New trends in the application of AES and XPS are related. (C) 2004 Elsevier B.V. All rights reserved.
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