Journal
FERROELECTRICS
Volume 314, Issue -, Pages 207-222Publisher
TAYLOR & FRANCIS LTD
DOI: 10.1080/00150190590926490
Keywords
nanoscale fabrication; nano cells; nano tubes; nano ribbons; nano rods; nano ferroelectrics
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A description is presented of present efforts to make thin-films for ferroelectric memory devices into truly three-dimensional objects, such as nano-tubes, nano-rods, and nanoribbons. These may have important applications for DRAM trenched capacitors. A summary of state-of-the-art magnetic RAM (MRAM) and ferroelectric FRAM devices is included.
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