Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 55, Issue 2, Pages 721-743Publisher
ELSEVIER
DOI: 10.1016/j.cirp.2006.10.005
Keywords
dimensional metrology; micro technology; nano technology
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The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient. Major research and development efforts have to be undertaken in order to answer these challenges. The developments have to include new measuring principles and instrumentation, tolerancing rules and procedures as well as traceability and calibration. The current paper describes issues and challenges in dimensional micro and nano metrology by reviewing typical measurement tasks and available instrumentation. Traceability and calibration issues are discussed subsequently. Finally needs and gaps are identified based on these observations.
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