☆ 4.8 Article

Mechanical and dielectric properties of pure-silica-zeolite low-k materials

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION (2006)

Journal

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Volume 45, Issue 38, Pages 6329-6332

Publisher

WILEY-V C H VERLAG GMBH

DOI: 10.1002/anie.200602036

Keywords

mechanical properties; porous materials; silicates; thin films; zeolites

Categories

Chemistry, Multidisciplinary

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