Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 153, Issue 3, Pages C186-C189Publisher
ELECTROCHEMICAL SOC INC
DOI: 10.1149/1.2165773
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N-doped TiO2 films were prepared by plasma-enhanced chemical vapor deposition (PECVD) using titanium tetraisopropoxide and NH3 mixture. Two nitrogen bonding states, substitutional and interstitial nitrogen atoms, are observed and about 80% of nitrogen atoms exits the substitutional sites irrespective of nitrogen content. The transition temperature from the anatase to rutile becomes lower in the N-doped TiO2 films compared with that of nondoped TiO2 films. Visible light photocatalysis, both photocatalytic decomposition of organic compounds and photoinduced hydrophilicity, was observed in the N-doped TiO2 films. It is considered that both nitrogen atoms substituted for oxygen atoms and crystalline structure contribute to the visible-light photocatalytic activity. (c) 2006 The Electrochemical Society.
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