4.2 Article Proceedings Paper

Textured PbZr0.3Ti0.7O3 thin films produced by polymeric precursor method using microwave oven

Journal

FERROELECTRICS
Volume 335, Issue -, Pages 211-218

Publisher

TAYLOR & FRANCIS LTD
DOI: 10.1080/00150190600691387

Keywords

ferroelectric; film; polymeric precursor route; PZT; microwave oven

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PbZr0.3Ti0.7O3 (PZT) films were produced by polymeric precursor route and deposited by spin-coater technique on Pt(111)/Ti/SiO2/Si(100) substrates. The films were heat-treated using different furnaces: (a) a conventional furnace, at 700 degrees C; and (b) a domestic microwave oven, at 600 degrees C. The X-ray patterns revealed that both films are single phase and reflections were identified as belongs to the PZT phase. The intensity of these reflections showed a (111), (001) and (100) preferred orientation. Morphological and electrical characterizations showed that all samples present a rather different microstructure and both with high spontaneous polarization.

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