Journal
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
Volume 200, Issue -, Pages 49-63Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.elspec.2015.05.013
Keywords
Soft X-ray absorption; STXM; SPEM; XPEEM; TXM; Ptychography
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Funding
- Office of Energy Research, Office of Basic Energy Sciences, Materials Sciences Division of the U.S. Department of Energy [DE-AC02-05CH11231]
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Instrumentation and current capabilities of soft X-ray (50-2000 eV) spectromicroscopy are outlined with examples from recently published and some new work. Four common techniques are treated transmission X-ray microscopy (TXM), scanning transmission X-ray microscopy (STXM), X-ray photoemission electron microscopy (XPEEM) and scanning photoemission microscopy (SPEM). I also present a fifth, emerging technique, that of soft X-ray spectro-ptychography which has significantly improved spatial resolution and provides new contrast mechanisms. Perspectives for near future (5-10 years) evolution of soft X-ray spectromicroscopy are outlined based on current trends and instrumentation under development. (C) 2015 Elsevier B.V. All rights reserved.
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