Surface measurement using active vision and light scattering

This paper reviews the recent progress in surface measurement methods using active vision and light-scattering techniques. The active vision methods with different structured light patterns and the corresponding techniques are summarized. The surface roughness and defects inspection with light-scattering are discussed. After the review, an integrative method to measure surface waviness and form, roughness is proposed. (C) 2006 Elsevier Ltd. All rights reserved.