A new fluoride synthesis route for successive ionic layer deposition of the ZnxZr(OH)(y)F(z)(.)nH(2)O nanolayers

It was for the fist time shown that hydroxo-fluoride nanolayers with the general formula MxZr(OH)(y)F-z center dot nH(2)O can be synthesized by the successive ionic layer deposition method using soluble complexes of metal fluorides as reagents. By an example of the ZnxZr(OH)(y)F-z center dot nH(2)O nanolayers on silicon surfaces, the effect of pH, the reagent concentration, and the number of the deposition cycles was examined. The composition and structure of these layers were determined by X-ray photoelectron and FTIR transmission spectroscopy, X-ray diffraction, scanning electron microscopy (SEM), while the growth kinetics was evaluated by ellipsometry. (c) 2006 Elsevier B.V. All rights reserved.