Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 78, Issue 6, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2747095
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A method is presented that allows direct measurement of a wide range of spring constants of cantilevers using an indentation instrument with an integrated optical microscope. An uncertainty of less than 10% can be achieved for spring constants from 0.1 to 10(2) N/m. The technique makes it possible to measure the spring constant at any desired location on a cantilever of any shape, particularly at the tip location of an atomic force microscopy cantilever. The article also demonstrates a technique to detect and correct apparent length anomalies of cantilevers by analyzing spring constants at multiple positions. (c) 2007 American Institute of Physics.
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