Toughness and adhesion of atomic layer deposited alumina films on polycarbonate substrates

A study is made of the cracking and interfacial adhesion characteristics of atomic layer deposited alumina films on as-received and water-plasma-treated polycarbonate using tensile testing. Optical microscopy was used to observe the initial cracking and subsequent evolution of multiple cracks and film delamination from the substrate during loading. The strength and toughness of the alumina film was determined to be 140 MPa and 0.23 MPa ml/z, respectively. Adhesion of the alumina films was improved for substrates pre-treated with water-plasma. Crown Copyright (c) 2006 Published by Elsevier Ltd. on behalf of Acta Materialia Inc. All rights reserved.