Journal
SMALL
Volume 3, Issue 1, Pages 132-138Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.200500418
Keywords
lithography; microfabrication; patterning; reactive ion etching
Categories
Funding
- NATIONAL HEART, LUNG, AND BLOOD INSTITUTE [R01HL075217] Funding Source: NIH RePORTER
- NHLBI NIH HHS [HL075217] Funding Source: Medline
Ask authors/readers for more resources
We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call bond-detach lithography, was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bond-detach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available
Share Paper
