Nano/Micro Patterning of Inorganic Thin Films

The present review is focused oil the site-selective deposition of inorganic thin films on self-assembled monolayer (SAM) templates. SAMs were used to modify the substrate surface with chemical functional groups. The patterned SAM substrate was prepared by exposing the SAM substrate to UV light through photomasks for photocleavage. The patterned SAM was used as the templates for deposition of ceramic thin films in aqueous solutions. The preparation and characterization methods of SAMs, and the preparation of the patterned SAM templates are explained, Solution chemistry for file deposition of ceramic oxides and the physics and chemistry of interfaces are described. Experimental examples are given to explain how these aspects influence the formation of films and their properties. Various examples of site-selective deposition of ceramic oxides on SAM templates are explained with classification into three categories: patterning by site-selective attachment of homogeneously nucleated particles, patterning by surface-selective heterogeneous nucleation and growth, and patterning by catalyst-induced heterogeneous nucleation. We also describe pattern-deposition oil flexible substrates and future views to improve the pattern resolution.