Journal
ELECTRONICS LETTERS
Volume -, Issue -, Pages 26-27Publisher
INST ENGINEERING TECHNOLOGY-IET
DOI: 10.1049/el:19850673
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The first all-silicon integrated-optical components for 1.3/1.6 mu m have been demonstrated. An optical power divider with end-fire coupling was constructed from intersecting channel waveguides. Guides were fabricated by plasma-etching of an intrinsic Si layer grown epitaxially on a heavily doped Si substrate (n on n(+) or p on p(+)). Active components are proposed.
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